Effect of mechanical stress on the traps in silicon nitride thin films

Effect of film stress on different electrical properties of PECVD grown SiNx films and its bilayer structures: A study of Si surface passivation strategy

(2023) Vijay D. Chavan et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Kinetics of environmentally assisted cracking in SiNx barrier films

(2019) Hao Luo et al.   APPLIED PHYSICS LETTERS

The Effect of Mechanical Stress on Cell Characteristics in MONOS Structures

(2018) Young-Taek Oh et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

Mechanical Stress Distribution and the Effects of Process Parameter Changes in Vertical NAND Flash Memory

(2017) Yeon Namkoong et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Environmentally Assisted Cracking in Silicon Nitride Barrier Films on Poly(ethylene terephthalate) Substrates

(2016) Kyungjin Kim et al.   ACS Applied Materials & Interfaces

Structural, compositional and optical properties of PECVD silicon nitride layers

(2012) Fouad Karouta et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Intrinsic stress effect on fracture toughness of plasma enhanced chemical vapor deposited SiNx:H films

(2010) Sean King et al.   THIN SOLID FILMS

Impact of mechanical stress on direct and trap-assisted gate leakage currents in p-type silicon metal-oxide-semiconductor capacitors

(2008) Youn Sung Choi et al.   APPLIED PHYSICS LETTERS

Fourier transform infrared spectroscopy of annealed silicon-rich silicon nitride thin films

(2008) G. Scardera et al.   JOURNAL OF APPLIED PHYSICS