Impact of mechanical stress on direct and trap-assisted gate leakage currents in p-type silicon metal-oxide-semiconductor capacitors

Published 2008 View Full Article

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Title
Impact of mechanical stress on direct and trap-assisted gate leakage currents in p-type silicon metal-oxide-semiconductor capacitors
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 17, Pages 173507
Publisher
AIP Publishing
Online
2008-05-04
DOI
10.1063/1.2917717
References
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