Mechanical Stress Distribution and the Effects of Process Parameter Changes in Vertical NAND Flash Memory

Published 2017 View Full Article

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Title
Mechanical Stress Distribution and the Effects of Process Parameter Changes in Vertical NAND Flash Memory
Authors
Keywords
-
Journal
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 17, Issue 7, Pages 5055-5060
Publisher
American Scientific Publishers
Online
2017-03-19
DOI
10.1166/jnn.2017.13739

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