A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications

Experimental and Numerical Analysis of a Novel Flow Conditioner for Accuracy Improvement of Ultrasonic Gas Flowmeters

(2022) Lei Li et al.   IEEE SENSORS JOURNAL

Tuning Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducers Using DC Bias Voltage

(2022) Zhipeng Wu et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

Sensitivity—Bandwidth Optimization of PMUT with Acoustical Matching Using Finite Element Method

(2022) Le-Ming He et al.   SENSORS

Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

(2022) Eyglis Ledesma et al.   Microsystems & Nanoengineering

MEMS ultrasonic transducers for safe, low-power and portable eye-blinking monitoring

(2022) Sheng Sun et al.   Microsystems & Nanoengineering

A Mathematical Model of a Piezoelectric Micro- Machined Hydrophone With Simulation and Experimental Validation

(2021) Qiang Wang et al.   IEEE SENSORS JOURNAL

Non-Contact Ultrasonic Flow Measurement for Small Pipes Based on AlN Piezoelectric Micromachined Ultrasonic Transducer Arrays

(2021) Ke Zhu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A Cantilever-Based Flow Sensor for Domestic and Agricultural Water Supply System

(2021) H. Harija et al.   IEEE SENSORS JOURNAL

Measurement of Pipe and Fluid Properties With a Matrix Array-Based Ultrasonic Clamp-On Flow Meter

(2021) Jack Massaad et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

(2021) Xianhao Le et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Enhancing AlN PMUTs’ Acoustic Responsivity within a MEMS-on-CMOS Process

(2021) Eyglis Ledesma et al.   SENSORS

A Novel Transfer Function Based Ring-Down Suppression System for PMUTs

(2021) Zhipeng Wu et al.   SENSORS

Deposition, Characterization, and Modeling of Scandium-Doped Aluminum Nitride Thin Film for Piezoelectric Devices

(2021) Qiaozhen Zhang et al.   Materials

An Ultrasonic Proximity Sensing Skin for Robot Safety Control by Using Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)

(2021) Zhihao Tong et al.   IEEE SENSORS JOURNAL

Sensitive and reliable thermal micro-flow sensor for a drug infusion system

(2020) Dongkyu Lee et al.   SENSORS AND ACTUATORS A-PHYSICAL

Tent-Plate AlN PMUT With a Piston-Like Shape Under Liquid Operation

(2020) Eyglis Ledesma et al.   IEEE SENSORS JOURNAL

An ultrasonic flowmeter for liquid flow measurement in small pipes using AlN piezoelectric micromachined ultrasonic transducer (PMUT) arrays

(2020) Ke Zhu et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Continuous ultrasonic flow measurement for aerospace small pipelines

(2020) Yong Chen et al.   ULTRASONICS

Effects of Velocity Profiles on Measuring Accuracy of Transit-Time Ultrasonic Flowmeter

(2019) Hui Zhang et al.   Applied Sciences-Basel

Highly Accurate Airflow Volumetric Flowmeters via pMUTs Arrays Based on Transit Time

(2019) Xuying Chen et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Dynamics of piezoelectric micro-machined ultrasonic transducers for contact and non-contact resonant sensors

(2019) Xinxin Liu et al.   JOURNAL OF APPLIED PHYSICS

Fluid Density Sensing Using Piezoelectric Micromachined Ultrasound Transducers

(2019) Kaustav Roy et al.   IEEE SENSORS JOURNAL

A Model-Based Hybrid Ultrasonic Gas Flowmeter

(2018) Yandan Jiang et al.   IEEE SENSORS JOURNAL

The Effect of Internal Pipe Wall Roughness on the Accuracy of Clamp-On Ultrasonic Flowmeters

(2018) Xiaotang Gu et al.   IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT

A Direct Sensor to Measure Minute Liquid Flow Rates

(2018) Preeti Sharma et al.   NANO LETTERS

Dynamic Offset Correction of Electromagnetic Flowmeters

(2018) Michael A. Linnert et al.   IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT

Transit Time Difference Flowmeter for Intravenous Flow Rate Measurement Using 1–3 Piezoelectric Composite Transducers

(2017) Taeyang Kim et al.   IEEE SENSORS JOURNAL

Design, Fabrication, and Characterization of Scandium Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducers

(2017) Qi Wang et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Monolithic ultrasound fingerprint sensor

(2017) Xiaoyue Jiang et al.   Microsystems & Nanoengineering

Zero-Bending Piezoelectric Micromachined Ultrasonic Transducer (pMUT) With Enhanced Transmitting Performance

(2015) Tao Wang et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

MEMS capacitive flow sensor for natural gas pipelines

(2015) Son D. Nguyen et al.   SENSORS AND ACTUATORS A-PHYSICAL

Note: Ultrasonic liquid flow meter for small pipes

(2012) Yang Yu et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Nanocomposite cerium oxide polymer matching layers with adjustable acoustic impedance between 4 MRayl and 7 MRayl

(2009) Frank Tiefensee et al.   ULTRASONICS

Micromachined ultrasonic transducers and arrays based on piezoelectric thick film

(2008) Zhihong Wang et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

A MEMS-Based Coriolis Mass Flow Sensor for Industrial Applications

(2008) R. Smith et al.   IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS