In Situ Nanolithography with Sub-10 nm Resolution Realized by Thermally Assisted Spin-Casting of a Self-Assembling Polymer
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Title
In Situ Nanolithography with Sub-10 nm Resolution Realized by Thermally Assisted Spin-Casting of a Self-Assembling Polymer
Authors
Keywords
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Journal
ADVANCED MATERIALS
Volume 27, Issue 33, Pages 4814-4822
Publisher
Wiley
Online
2015-07-15
DOI
10.1002/adma.201501363
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