The multi-dimensional characterization of Al-doped CuO thin films by laser-induced breakdown spectroscopy (LIBS) with nanosecond and picosecond lasers
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Title
The multi-dimensional characterization of Al-doped CuO thin films by laser-induced breakdown spectroscopy (LIBS) with nanosecond and picosecond lasers
Authors
Keywords
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Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 153, Issue -, Pages 107162
Publisher
Elsevier BV
Online
2022-10-14
DOI
10.1016/j.mssp.2022.107162
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