Optimization of process parameters for the electrical properties in Ga-doped ZnO thin films prepared by r.f. magnetron sputtering

Published 2014 View Full Article

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Title
Optimization of process parameters for the electrical properties in Ga-doped ZnO thin films prepared by r.f. magnetron sputtering
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 298, Issue -, Pages 208-213
Publisher
Elsevier BV
Online
2014-02-02
DOI
10.1016/j.apsusc.2014.01.163

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