Micromachining of predesigned perpendicular copper micropillar array by scanning electrochemical microscopy
Published 2023 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
Micromachining of predesigned perpendicular copper micropillar array by scanning electrochemical microscopy
Authors
Keywords
-
Journal
ELECTROCHIMICA ACTA
Volume 442, Issue -, Pages 141913
Publisher
Elsevier BV
Online
2023-01-17
DOI
10.1016/j.electacta.2023.141913
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- Fabrication of Through-glass Vias (TGV) based 3D microstructures in glass substrate by a lithography-free process for MEMS applications
- (2022) Vishnu Kant Bajpai et al. APPLIED SURFACE SCIENCE
- Spatially-separated and photo-enhanced semiconductor corrosion processes for high-efficient and contamination-free electrochemical nanoimprint lithography
- (2022) Hantao Xu et al. Science China-Chemistry
- Pulse Potential Confined Electrochemical Polishing on Gallium Arsenide Wafer
- (2021) Lianhuan Han et al. JOURNAL OF THE ELECTROCHEMICAL SOCIETY
- Fabrication Methods for Microfluidic Devices: An Overview
- (2021) Simon Scott et al. Micromachines
- Cobaloxime Complex Salts: Synthesis, Patterning on Carbon Nanomembranes and Heterogeneous Hydrogen Evolution Studies
- (2021) Eva Oswald et al. CHEMISTRY-A EUROPEAN JOURNAL
- Direct Nanomachining on Semiconductor Wafer By Scanning Electrochemical Microscopy
- (2020) Lianhuan Han et al. ANGEWANDTE CHEMIE-INTERNATIONAL EDITION
- Electrochemical nanomachining
- (2020) Lianhuan Han et al. Current Opinion in Electrochemistry
- Reduced Graphene Oxide Nanohybrid-Assembled Microneedles as Mini-Invasive Electrodes for Real-Time Transdermal Biosensing
- (2019) Quanchang Jin et al. Small
- Superamphiphobic Cu/CuO Micropillar Arrays with High Repellency Towards Liquids of Extremely High Viscosity and Low Surface Tension
- (2019) Qing Zhu et al. Scientific Reports
- Tip-Substrate-Distance Dependent Etching Process of III-V Semiconductors Investigated by Scanning Electrochemical Microscopy
- (2019) Jie Zhang et al. Journal of Physical Chemistry C
- An Artificial Somatic Reflex Arc
- (2019) Ke He et al. ADVANCED MATERIALS
- The coupling effect of slow-rate mechanical motion on the confined etching process in electrochemical mechanical micromachining
- (2018) Lianhuan Han et al. Science China-Chemistry
- Nanofabrication of the gold scanning probe for the STM-SECM coupling system with nanoscale spatial resolution
- (2017) Fang-Fang Wang et al. Science China-Chemistry
- Confined Chemical Etching for Electrochemical Machining with Nanoscale Accuracy
- (2016) Dongping Zhan et al. ACCOUNTS OF CHEMICAL RESEARCH
- Write–Read 3D Patterning with a Dual-Channel Nanopipette
- (2016) Dmitry Momotenko et al. ACS Nano
- Sandwich-like electrochemical micromachining of micro-dimples
- (2016) Xifang Zhang et al. SURFACE & COATINGS TECHNOLOGY
- Electrochemical Micromachining under Mechanical Motion Mode
- (2015) Ye Yuan et al. ELECTROCHIMICA ACTA
- Progress towards biocompatible intracortical microelectrodes for neural interfacing applications
- (2014) Mehdi Jorfi et al. Journal of Neural Engineering
- A Leveling Method Based on Current Feedback Mode of Scanning Electrochemical Microscopy
- (2013) Lianhuan Han et al. ANALYTICAL CHEMISTRY
- Meniscus confined fabrication of multidimensional conducting polymer nanostructures with scanning electrochemical cell microscopy (SECCM)
- (2013) Kim McKelvey et al. CHEMICAL COMMUNICATIONS
- Fabrication and separation performance evaluation of a metal–organic framework based microseparator device
- (2013) Tom R.C. Van Assche et al. CHEMICAL ENGINEERING SCIENCE
- Electrochemical mechanical micromachining based on confined etchant layer technique
- (2013) Ye Yuan et al. FARADAY DISCUSSIONS
- Extreme Bottom-Up Superfilling of Through-Silicon-Vias by Damascene Processing: Suppressor Disruption, Positive Feedback and Turing Patterns
- (2012) T. P. Moffat et al. JOURNAL OF THE ELECTROCHEMICAL SOCIETY
- Solid-State Redox Solutions: Microfabrication and Electrochemistry
- (2011) Dezhi Yang et al. ANGEWANDTE CHEMIE-INTERNATIONAL EDITION
Discover Peeref hubs
Discuss science. Find collaborators. Network.
Join a conversationBecome a Peeref-certified reviewer
The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.
Get Started