Improve photo-to-dark current ratio of p-Si/SiO2/n-Ga2O3 heterojunction solar-blind photodetector by inserting SiO2 barrier layer
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Title
Improve photo-to-dark current ratio of p-Si/SiO2/n-Ga2O3 heterojunction solar-blind photodetector by inserting SiO2 barrier layer
Authors
Keywords
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Journal
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume 40, Issue 5, Pages 052207
Publisher
American Vacuum Society
Online
2022-09-16
DOI
10.1116/5.0107495
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