Thick-film MEMS thermoelectric sensor fabricated using a thermally assisted lift-off process

Published 2016 View Full Article

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Title
Thick-film MEMS thermoelectric sensor fabricated using a thermally assisted lift-off process
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 15, Issue 2, Pages 024501
Publisher
SPIE-Intl Soc Optical Eng
Online
2016-06-09
DOI
10.1117/1.jmm.15.2.024501

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