Thick-film MEMS thermoelectric sensor fabricated using a thermally assisted lift-off process

标题
Thick-film MEMS thermoelectric sensor fabricated using a thermally assisted lift-off process
作者
关键词
-
出版物
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 15, Issue 2, Pages 024501
出版商
SPIE-Intl Soc Optical Eng
发表日期
2016-06-09
DOI
10.1117/1.jmm.15.2.024501

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