Thin Film Transistors Using Wafer-Scale Low-Temperature MOCVD WSe2

Title
Thin Film Transistors Using Wafer-Scale Low-Temperature MOCVD WSe2
Authors
Keywords
Transition metal dichalcogenide, tungsten diselenide, MOCVD, CVD, thin film transistor, field effect transistor, wafer-scale, low temperature
Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 45, Issue 12, Pages 6280-6284
Publisher
Springer Nature
Online
2016-10-21
DOI
10.1007/s11664-016-4987-2

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