Comparison of Vibration-Assisted Scratch Characteristics of SiC Polytypes (3C-, 4H- and 6H-SiC)
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Title
Comparison of Vibration-Assisted Scratch Characteristics of SiC Polytypes (3C-, 4H- and 6H-SiC)
Authors
Keywords
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Journal
Micromachines
Volume 13, Issue 4, Pages 640
Publisher
MDPI AG
Online
2022-04-19
DOI
10.3390/mi13040640
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