Unconventional Use of a Photoresist as a Nitrogen Gas Generator Forming Transparent Dome-Shaped Microcavities
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Title
Unconventional Use of a Photoresist as a Nitrogen Gas Generator Forming Transparent Dome-Shaped Microcavities
Authors
Keywords
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Journal
ADVANCED ENGINEERING MATERIALS
Volume 18, Issue 4, Pages 559-566
Publisher
Wiley
Online
2015-12-21
DOI
10.1002/adem.201500508
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