On the solid phase crystallization of In2O3:H transparent conductive oxide films prepared by atomic layer deposition
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Title
On the solid phase crystallization of In2O3:H transparent conductive oxide films prepared by atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 120, Issue 8, Pages 085314
Publisher
AIP Publishing
Online
2016-09-01
DOI
10.1063/1.4962008
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