A 10 nm Short Channel MoS 2 Transistor without the Resolution Requirement of Photolithography
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Title
A 10 nm Short Channel MoS
2
Transistor without the Resolution Requirement of Photolithography
Authors
Keywords
-
Journal
Advanced Electronic Materials
Volume 7, Issue 12, Pages 2100543
Publisher
Wiley
Online
2021-10-21
DOI
10.1002/aelm.202100543
References
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Related references
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