Tuning Hyrbrid Ferroelectric and Antiferroelectric Stacks for Low Power FeFET and FeRAM Applications by Using Laminated HSO and HZO films
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Title
Tuning Hyrbrid Ferroelectric and Antiferroelectric Stacks for Low Power FeFET and FeRAM Applications by Using Laminated HSO and HZO films
Authors
Keywords
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Journal
Advanced Electronic Materials
Volume -, Issue -, Pages 2100837
Publisher
Wiley
Online
2022-01-05
DOI
10.1002/aelm.202100837
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