Tuning Hyrbrid Ferroelectric and Antiferroelectric Stacks for Low Power FeFET and FeRAM Applications by Using Laminated HSO and HZO films

Title
Tuning Hyrbrid Ferroelectric and Antiferroelectric Stacks for Low Power FeFET and FeRAM Applications by Using Laminated HSO and HZO films
Authors
Keywords
-
Journal
Advanced Electronic Materials
Volume -, Issue -, Pages 2100837
Publisher
Wiley
Online
2022-01-05
DOI
10.1002/aelm.202100837

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