Impact of Incorporation Kinetics on Device Fabrication with Atomic Precision
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Title
Impact of Incorporation Kinetics on Device Fabrication with Atomic Precision
Authors
Keywords
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Journal
Physical Review Applied
Volume 16, Issue 5, Pages -
Publisher
American Physical Society (APS)
Online
2021-11-18
DOI
10.1103/physrevapplied.16.054037
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