Lithography for robust and editable atomic-scale silicon devices and memories
Published 2018 View Full Article
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Title
Lithography for robust and editable atomic-scale silicon devices and memories
Authors
Keywords
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Journal
Nature Communications
Volume 9, Issue 1, Pages -
Publisher
Springer Nature
Online
2018-07-11
DOI
10.1038/s41467-018-05171-y
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