4.6 Article

Structure and Electrical Behavior of Hafnium-Praseodymium Oxide Thin Films Grown by Atomic Layer Deposition

Journal

MATERIALS
Volume 15, Issue 3, Pages -

Publisher

MDPI
DOI: 10.3390/ma15030877

Keywords

hafnium oxide; praseodymium oxide; atomic layer deposition; crystal structure; dielectric properties; resistive switching

Funding

  1. Spanish Ministry of Science, Innovation and Universities grant [TEC2017-84321-C4-2-R]
  2. Feder funds
  3. European Regional Development Fund project Emerging orders in quantum and nanomaterials [TK134]
  4. Estonian Research Agency [PSG448, PRG753]

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Thin films of hafnium-praseodymium oxide grown by atomic layer deposition show different crystal structure and electrical properties compared to undoped HfO2 films. Pr-doped films exhibit higher relative permittivities and stable resistance state currents, with potential for reduced power consumption and promising application prospects.
Crystal structure and electrical properties of hafnium-praseodymium oxide thin films grown by atomic layer deposition on ruthenium substrate electrodes were characterized and compared with those of undoped HfO2 films. The HfO2 reference films crystallized in the stable monoclinic phase of HfO2. Mixing HfO2 and PrOx resulted in the growth of nanocrystalline metastable tetragonal HfO2. The highest relative permittivities reaching 37-40 were measured for the films with tetragonal structures that were grown using HfO2:PrOx cycle ratio of 5:1 and possessed Pr/(Pr + Hf) atomic ratios of 0.09-0.10. All the HfO2:PrOx films exhibited resistive switching behavior. Lower commutation voltages and current values, promising in terms of reduced power consumption, were achieved for the films grown with HfO2:PrOx cycle ratios of 3:1 and 2:1 and showing Pr/(Pr + Hf) atomic ratios of 0.16-0.23. Differently from the undoped HfO2 films, the Pr-doped films showed low variability of resistance state currents and stable endurance behavior, extending over 10(4) switching cycles.

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