Reaching silicon-based NEMS performances with 3D printed nanomechanical resonators
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Title
Reaching silicon-based NEMS performances with 3D printed nanomechanical resonators
Authors
Keywords
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Journal
Nature Communications
Volume 12, Issue 1, Pages -
Publisher
Springer Science and Business Media LLC
Online
2021-10-19
DOI
10.1038/s41467-021-26353-1
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