Two-Photon Polymerization Lithography and Laser Doppler Vibrometry of a SU-8-Based Suspended Microchannel Resonator

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Title
Two-Photon Polymerization Lithography and Laser Doppler Vibrometry of a SU-8-Based Suspended Microchannel Resonator
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 24, Issue 4, Pages 1038-1042
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2014-12-24
DOI
10.1109/jmems.2014.2376986

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