Effect of oxygen and hydrogen flow ratio on indium tin oxide films in rear-junction silicon heterojunction solar cells

Title
Effect of oxygen and hydrogen flow ratio on indium tin oxide films in rear-junction silicon heterojunction solar cells
Authors
Keywords
Hydrogenated Indium Tin Oxide, Silicon Heterojunction, Sputter damage
Journal
SOLAR ENERGY
Volume 231, Issue -, Pages 578-585
Publisher
Elsevier BV
Online
2021-12-14
DOI
10.1016/j.solener.2021.12.007

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