Optical and electrical properties of indium tin oxide thin films sputter-deposited in working gas containing hydrogen without heat treatments

Published 2008 View Full Article

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Title
Optical and electrical properties of indium tin oxide thin films sputter-deposited in working gas containing hydrogen without heat treatments
Authors
Keywords
-
Journal
MATERIALS LETTERS
Volume 63, Issue 6-7, Pages 641-643
Publisher
Elsevier BV
Online
2008-12-17
DOI
10.1016/j.matlet.2008.12.008

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