Effect of thermally grown Al2O3 on electrical insulation properties of thin film sensors for high temperature environments
出版年份 2021 全文链接
标题
Effect of thermally grown Al2O3 on electrical insulation properties of thin film sensors for high temperature environments
作者
关键词
Thermally grown, High temperature oxidation, Insulation properties, Thin film sensor, Buffer layer
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 331, Issue -, Pages 113033
出版商
Elsevier BV
发表日期
2021-08-14
DOI
10.1016/j.sna.2021.113033
参考文献
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