YSZ/Al 2 O 3 multilayered film as insulating layer for high temperature thin film strain gauge prepared on Ni-based superalloy

Title
YSZ/Al 2 O 3 multilayered film as insulating layer for high temperature thin film strain gauge prepared on Ni-based superalloy
Authors
Keywords
Thin film sensor, Insulating layer, High temperature, Ni-based superalloy, Strain gauge
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 279, Issue -, Pages 272-277
Publisher
Elsevier BV
Online
2018-06-19
DOI
10.1016/j.sna.2018.06.032

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