The Application of Nano-SiOx Coatings as Migration Resistance Layer by Plasma Enhanced Chemical Vapor Deposition

Title
The Application of Nano-SiOx Coatings as Migration Resistance Layer by Plasma Enhanced Chemical Vapor Deposition
Authors
Keywords
-
Journal
PLASMA CHEMISTRY AND PLASMA PROCESSING
Volume 32, Issue 4, Pages 755-766
Publisher
Springer Nature
Online
2012-04-10
DOI
10.1007/s11090-012-9370-3

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