Cryogenic Focused Ion Beam Enables Atomic-Resolution Imaging of Local Structures in Highly Sensitive Bulk Crystals and Devices
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Title
Cryogenic Focused Ion Beam Enables Atomic-Resolution Imaging of Local Structures in Highly Sensitive Bulk Crystals and Devices
Authors
Keywords
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Journal
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
Volume 144, Issue 7, Pages 3182-3191
Publisher
American Chemical Society (ACS)
Online
2022-02-15
DOI
10.1021/jacs.1c12794
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