HfO2-ZrO2 Superlattice Ferroelectric Capacitor With Improved Endurance Performance and Higher Fatigue Recovery Capability

出版年份 2021 全文链接

标题

作者

关键词

出版物

Volume 43, Issue 2, Pages 216-219

出版商

Institute of Electrical and Electronics Engineers (IEEE)

发表日期

2021-12-17

DOI

10.1109/led.2021.3135961

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