Sputter yields of rough surfaces: Importance of the mean surface inclination angle from nano- to microscopic rough regimes
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Title
Sputter yields of rough surfaces: Importance of the mean surface inclination angle from nano- to microscopic rough regimes
Authors
Keywords
Sputtering, Surface roughness, Sputtering simulation, Quartz crystal microbalance, Tungsten
Journal
APPLIED SURFACE SCIENCE
Volume 570, Issue -, Pages 151204
Publisher
Elsevier BV
Online
2021-09-09
DOI
10.1016/j.apsusc.2021.151204
References
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