Low-temperature growth of crystalline Tin(II) monosulfide thin films by atomic layer deposition using a liquid divalent tin precursor
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Title
Low-temperature growth of crystalline Tin(II) monosulfide thin films by atomic layer deposition using a liquid divalent tin precursor
Authors
Keywords
Atomic layer deposition, Tin monosulfide, Sn (II) precursor, Density functional theory, Spectroscopic ellipsometry
Journal
APPLIED SURFACE SCIENCE
Volume 565, Issue -, Pages 150152
Publisher
Elsevier BV
Online
2021-07-09
DOI
10.1016/j.apsusc.2021.150152
References
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