Influence mechanism of defects on the subsurface damage and structural evolution of diamond in CMP process
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Title
Influence mechanism of defects on the subsurface damage and structural evolution of diamond in CMP process
Authors
Keywords
Diamond, ReaxFF MD, Defects, CMP, Subsurface damage
Journal
APPLIED SURFACE SCIENCE
Volume 566, Issue -, Pages 150638
Publisher
Elsevier BV
Online
2021-07-16
DOI
10.1016/j.apsusc.2021.150638
References
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