Al2O3/ $\beta $ -Ga2O3(-201) Interface Improvement Through Piranha Pretreatment and Postdeposition Annealing

Published 2016 View Full Article

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Title
Al2O3/ $\beta $ -Ga2O3(-201) Interface Improvement Through Piranha Pretreatment and Postdeposition Annealing
Authors
Keywords
-
Journal
IEEE ELECTRON DEVICE LETTERS
Volume 37, Issue 11, Pages 1411-1414
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2016-09-14
DOI
10.1109/led.2016.2609202

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