Al2O3/ $\beta $ -Ga2O3(-201) Interface Improvement Through Piranha Pretreatment and Postdeposition Annealing

标题
Al2O3/ $\beta $ -Ga2O3(-201) Interface Improvement Through Piranha Pretreatment and Postdeposition Annealing
作者
关键词
-
出版物
IEEE ELECTRON DEVICE LETTERS
Volume 37, Issue 11, Pages 1411-1414
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2016-09-14
DOI
10.1109/led.2016.2609202

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