Low-Pressure CVD of GeE (E = Te, Se, S) Thin Films from Alkylgermanium Chalcogenolate Precursors and Effect of Deposition Temperature on the Thermoelectric Performance of GeTe

Title
Low-Pressure CVD of GeE (E = Te, Se, S) Thin Films from Alkylgermanium Chalcogenolate Precursors and Effect of Deposition Temperature on the Thermoelectric Performance of GeTe
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 13, Issue 40, Pages 47773-47783
Publisher
American Chemical Society (ACS)
Online
2021-10-05
DOI
10.1021/acsami.1c14237

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