Intermediate Cu-O-Si Phase in the Cu-SiO2/Si(111) System: Growth, Elemental, and Electrical Studies
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Title
Intermediate Cu-O-Si Phase in the Cu-SiO2/Si(111) System: Growth, Elemental, and Electrical Studies
Authors
Keywords
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Journal
ACS Omega
Volume 6, Issue 37, Pages 23826-23836
Publisher
American Chemical Society (ACS)
Online
2021-09-09
DOI
10.1021/acsomega.1c02646
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