Smooth or not: Robust fused silica micro-components by femtosecond-laser-assisted etching
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Title
Smooth or not: Robust fused silica micro-components by femtosecond-laser-assisted etching
Authors
Keywords
Fused Silica, Femtosecond Laser, Chemical Etching, Micromechanics
Journal
MATERIALS & DESIGN
Volume 204, Issue -, Pages 109670
Publisher
Elsevier BV
Online
2021-03-23
DOI
10.1016/j.matdes.2021.109670
References
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