4.6 Article

Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching

Journal

APPLIED PHYSICS LETTERS
Volume 101, Issue 10, Pages -

Publisher

AMER INST PHYSICS
DOI: 10.1063/1.4750236

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Funding

  1. European Commission as part of the NMP/Factory of the Future initiative

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Femtosecond laser manufacturing combined with chemical etching has recently emerged as a flexible platform for fabricating three-dimensional devices and integrated optical elements in glass substrates. Here, we demonstrate an optically transparent micro-actuator fabricated out of a single piece of fused silica. This work paves the road for further functional integration in glass substrate and optically transparent microsystems. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4750236]

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