Smooth or not: Robust fused silica micro-components by femtosecond-laser-assisted etching
出版年份 2021 全文链接
标题
Smooth or not: Robust fused silica micro-components by femtosecond-laser-assisted etching
作者
关键词
Fused Silica, Femtosecond Laser, Chemical Etching, Micromechanics
出版物
MATERIALS & DESIGN
Volume 204, Issue -, Pages 109670
出版商
Elsevier BV
发表日期
2021-03-23
DOI
10.1016/j.matdes.2021.109670
参考文献
相关参考文献
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