Layer exchange during aluminum-induced crystallization of silicon suboxide thin films

Title
Layer exchange during aluminum-induced crystallization of silicon suboxide thin films
Authors
Keywords
Thin films, Phase transformation, Aluminum-induced crystallization, Aluminum-induced layer exchange, Polycrystalline silicon, Silicon suboxide
Journal
MATERIALS LETTERS
Volume 293, Issue -, Pages 129723
Publisher
Elsevier BV
Online
2021-03-18
DOI
10.1016/j.matlet.2021.129723

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