Mechanism of Electron-Beam Manipulation of Single-Dopant Atoms in Silicon
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Title
Mechanism of Electron-Beam Manipulation of Single-Dopant Atoms in Silicon
Authors
Keywords
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Journal
Journal of Physical Chemistry C
Volume 125, Issue 29, Pages 16041-16048
Publisher
American Chemical Society (ACS)
Online
2021-07-20
DOI
10.1021/acs.jpcc.1c03549
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