Direct atomic fabrication and dopant positioning in Si using electron beams with active real-time image-based feedback

Published 2018 View Full Article

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Title
Direct atomic fabrication and dopant positioning in Si using electron beams with active real-time image-based feedback
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 29, Issue 25, Pages 255303
Publisher
IOP Publishing
Online
2018-04-04
DOI
10.1088/1361-6528/aabb79

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