Directed Atom-by-Atom Assembly of Dopants in Silicon

Published 2018 View Full Article

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Title
Directed Atom-by-Atom Assembly of Dopants in Silicon
Authors
Keywords
-
Journal
ACS Nano
Volume 12, Issue 6, Pages 5873-5879
Publisher
American Chemical Society (ACS)
Online
2018-05-12
DOI
10.1021/acsnano.8b02001

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