Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding
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Title
Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 31, Issue 8, Pages 085008
Publisher
IOP Publishing
Online
2021-07-01
DOI
10.1088/1361-6439/ac0ff7
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