In situ investigation of nanometric cutting of 3C-SiC using scanning electron microscope
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Title
In situ investigation of nanometric cutting of 3C-SiC using scanning electron microscope
Authors
Keywords
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Journal
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume 115, Issue 7-8, Pages 2299-2312
Publisher
Springer Science and Business Media LLC
Online
2021-05-23
DOI
10.1007/s00170-021-07278-x
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