Effect of Process Temperature and Reaction Cycle Number on Atomic Layer Deposition of TiO2 Thin Films Using TiCl4 and H2O Precursors: Correlation Between Material Properties and Process Environment

Nanostructured thin films based on TiO2 and/or SiC for use in photoelectrochemical cells: A review of the material characteristics, synthesis and recent applications

(2015) R.S. Pessoa et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Role of HCl in Atomic Layer Deposition of TiO2Thin Films from Titanium Tetrachloride and Water

(2014) Jina Leem et al.   BULLETIN OF THE KOREAN CHEMICAL SOCIETY

Evaluating the Critical Thickness of TiO2Layer on Insulating Mesoporous Templates for Efficient Current Collection in Dye-Sensitized Solar Cells

(2013) Aravind Kumar Chandiran et al.   ADVANCED FUNCTIONAL MATERIALS

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

(2013) Ville Miikkulainen et al.   JOURNAL OF APPLIED PHYSICS

An overview of photocatalysis phenomena applied to NOx abatement

(2013) Joana Ângelo et al.   JOURNAL OF ENVIRONMENTAL MANAGEMENT

TiO2 photocatalyst for water treatment applications

(2013) Seul-Yi Lee et al.   JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY

Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors

(2013) Rohan P. Chaukulkar et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

A review of growth mechanism, structure and crystallinity of anodized TiO2 nanotubes

(2013) D. Regonini et al.   MATERIALS SCIENCE & ENGINEERING R-REPORTS

Electron Microscopy Observation of TiO2 Nanocrystal Evolution in High-Temperature Atomic Layer Deposition

(2013) Jian Shi et al.   NANO LETTERS

Electrical and optical properties of TiO2thin films prepared by plasma-enhanced atomic layer deposition

(2013) Van-Son Dang et al.   PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

Recent progress in biomedical applications of titanium dioxide

(2013) Zi Fei Yin et al.   PHYSICAL CHEMISTRY CHEMICAL PHYSICS

Atomic layer deposition of TiO2 from TiCl4 and O3

(2013) Lauri Aarik et al.   THIN SOLID FILMS

Rutile TiO 2 thin films grown by reactive high power impulse magnetron sputtering

(2013) B. Agnarsson et al.   THIN SOLID FILMS

Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition

(2012) Jaesang Lee et al.   PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing

(2012) J A van Delft et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Controlling the Crystallinity and Roughness of Atomic Layer Deposited Titanium Dioxide Films

(2011) Riikka L. Puurunen et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

A surface science perspective on TiO2 photocatalysis

(2011) Michael A. Henderson   SURFACE SCIENCE REPORTS

Nanotechnology for sustainable energy

(2009) Elena Serrano et al.   RENEWABLE & SUSTAINABLE ENERGY REVIEWS

Low temperature atomic layer deposition of titania thin films

(2009) G. Triani et al.   THIN SOLID FILMS

Morphological and Photoelectrochemical Properties of ALD TiO[sub 2] Films

(2008) Hsyi-En Cheng et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

The effect of oxygen concentration on the low temperature deposition of TiO2 thin films

(2007) H. Toku et al.   SURFACE & COATINGS TECHNOLOGY