Electron Microscopy Observation of TiO2 Nanocrystal Evolution in High-Temperature Atomic Layer Deposition

Title
Electron Microscopy Observation of TiO2 Nanocrystal Evolution in High-Temperature Atomic Layer Deposition
Authors
Keywords
-
Journal
NANO LETTERS
Volume 13, Issue 11, Pages 5727-5734
Publisher
American Chemical Society (ACS)
Online
2013-10-04
DOI
10.1021/nl403566u

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