Spin-coating for fabrication of high-entropy high-k (AlTiVZrHf)O films on Si for advanced gate stacks
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Title
Spin-coating for fabrication of high-entropy high-k (AlTiVZrHf)O films on Si for advanced gate stacks
Authors
Keywords
Spin coating, High-entropy oxide, (AlTiVZrHf)O, , film, Metal–oxide–semiconductor gate stack, Dielectric and thermal properties
Journal
CERAMICS INTERNATIONAL
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2021-05-01
DOI
10.1016/j.ceramint.2021.04.267
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