Self‐Replication of Deeply Buried Doped Silicon Structures, which Remotely Control the Etching Process: A New Method for Forming a Silicon Pattern from the Bottom Up

Title
Self‐Replication of Deeply Buried Doped Silicon Structures, which Remotely Control the Etching Process: A New Method for Forming a Silicon Pattern from the Bottom Up
Authors
Keywords
-
Journal
ADVANCED FUNCTIONAL MATERIALS
Volume -, Issue -, Pages 2100105
Publisher
Wiley
Online
2021-05-04
DOI
10.1002/adfm.202100105

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