Anisotropic Etching of Pyramidal Silica Reliefs with Metal Masks and Hydrofluoric Acid
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Title
Anisotropic Etching of Pyramidal Silica Reliefs with Metal Masks and Hydrofluoric Acid
Authors
Keywords
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Journal
Small
Volume -, Issue -, Pages 2002290
Publisher
Wiley
Online
2020-10-05
DOI
10.1002/smll.202002290
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